Micro-Trak™ 101 Series Ultra Low Flow Mass Flow Meters & Controllers


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As today’s science and engineering focus more and more on micro technology, the requirement to be able to measure and control extremely low gas mass flows has become very important. With state-of-the-art sensor technology and highly engineered direct acting valve design, Micro-Trak accurately measures and controls micro mass flows of gas previously thought by scientists to be too low for a repeatable reading.

Micro-Trak is specifically designed for flow ranges under 4 sccm (smlm) with a minimum controllable mass flow rate of 0.1 sccm (smlm). Micro-Trak is a specialized instrument for those who need accurate and reliable micro mass flow control of clean gases including corrosives and toxics.

Excellent accuracy (+/- 1.0% of full scale) and reliability (+/- 0.2%) coupled with unsurpassed instrument stability offer customers an instrument they can depend on, month after month, year after year.